Operating Experience with a New Reactive Ion Plating Unit for TiN Coating
During 1986, a physical vapor deposition titanium nitride reactive ion plating unit, the first of its kind shipped to the U.S., was put in to operation. Â It was designed for electron beam evaporation of titanium, utilizing triode plasma configuration and hot filament ionization assist. Â This article outlines some start-up and learning problems, and describes present equipment, Vacuum Furnace Systems Corp. modifications, and helpful processing tips.
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